Dual-Beam Multi-ion Plasma FIB-SEM: Thermo Fisher Helios 5 Hydra CX

The Thermo Fisher Helios 5 Hydra CX is a state-of-the-art, ultra high resolution Plasma Focused Ion Beam - Scanning Electron Microscope (PFIB-SEM). The Elstar electron column with high-current UC+ monochromator technology and Schottky field emission gun provides sub-nanometer imaging resolution. The next-generation 2.5 μA plasma FIB column provides

Plasma Beam Capabilities:
Plasma Ion Species: Xe, Ar, O, N
Ion beam current range: 1.5 pA to 2.5 µA
Accelerating voltage range: 500 V - 30 kV
Maximum horizontal field width: 0.9 mm at beam coincidence point
Xe Beam Resolution at coincident point:
<20 nm at 30 kV using preferred statistical method
<10 nm at 30 kV using selective edge method

Electron Beam Capabilities:
Current range: 0.8 pA to 100 nA at all accelerating voltages
Accelerating voltage range: 350 V – 30 kV
Landing energy range: 20* eV – 30 keV
Maximum horizontal field width: 2.3 mm at 4 mm WD
Electron Image Resolution:
At Optimum WD: 0.7 nm at 1 kV, 1.0 nm at 500 V (ICD)
At coincident point: 0.6 nm at 15 kV, 1.2 nm at 1 kV

Accessories:
EDS Detector (Oxford)
STEM 3+ Detector
Charge Neutralizer
Cryo Stage Module (Aquilos-like)
Inert Transfer Module (CleanConnect™)