Ultra-High Resolution FE-SEM: Hitachi SU5000 VP

The Hitachi SU5000 VP is an ultra-high resolution Field Emission - Scanning Electron Microscope (FE-SEM) that operates in both high vacuum pressure and variable pressure modes, allowing flexibility to handle wide range of specimens. Variable pressure technology allows users to image their samples without need for conducting coatings. This is extremely useful for reducing the charging of insulating surfaces, such as those of delicate biological and polymer samples.

System Capabilities:
ZrO/W Schottky Emission Electron Gun
Electron Image Resolution:
1.2 nm (@ 30 kV, WD = 5 mm, Mag. 180kx)
3.0 nm (@1 kV, WD = 3 mm, Mag. 80kx)
2.0 nm (@1 kV, WD = 3 mm, Mag. 120kx) with Beam Deceleration
5-axis (X,Y, Z, R, and T) Motorized Computer Eucentric Stage
Accommodates 8" Diameter Specimens (Max. 80mm Height)
Variable Pressure Range: 10 - 300 Pa
200 nA of Beam Current in both HV and VP Modes

Accessories:
EDS Detector (Oxford)
WDS Detector (Oxford)