Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 10/6/03 → 02/28/05 |
Funding
- SEMATECH: $767,594.38
Feasibility of ALD for Mask Blank Multilayer Lith 144
- Eisenbraun, Eric (PI)
Project: Research
Project: Research
| Status | Finished |
|---|---|
| Effective start/end date | 10/6/03 → 02/28/05 |