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Non-Destructive Structural and MicroStructural Characterization in Support of Large Diameter, Low Defect 4H-SiC Substrates, CVD Epitaxy and SiC High Power Devices

Project: Research

Project Details

StatusFinished
Effective start/end date08/27/0206/30/04

Funding

  • US Air Force Office of Scientific Research: $72,000.00