Abstract
The first functional 6V, 4Mb silicon nanocrystal based nonvolatile memory arrays using conventional 90nm and 0.25μm process technologies have been produced. The technology can be programmed and erased using conventional techniques in floating gate memories and can substantially reduce the cost of embedded Flash at the 90nm node and beyond.
| Original language | English |
|---|---|
| Pages (from-to) | 601-604 |
| Number of pages | 4 |
| Journal | Technical Digest - International Electron Devices Meeting |
| State | Published - 2003 |
| Event | IEEE International Electron Devices Meeting - Washington, DC, United States Duration: Dec 8 2003 → Dec 10 2003 |
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