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A 6V Embedded 90nm Silicon Nanocrystal Nonvolatile Memory

  • R. Muralidhar
  • , R. F. Steimle
  • , M. Sadd
  • , R. Rao
  • , C. T. Swift
  • , E. J. Prinz
  • , J. Yater
  • , L. Grieve
  • , K. Harber
  • , B. Hradsky
  • , S. Straub
  • , B. Acred
  • , W. Paulson
  • , W. Chen
  • , L. Parker
  • , S. G.H. Anderson
  • , M. Rossow
  • , T. Merchant
  • , M. Paransky
  • , T. Huynh
  • D. Hadad, Ko Min Chang, B. E. White

Research output: Contribution to journalConference articlepeer-review

65 Scopus citations

Abstract

The first functional 6V, 4Mb silicon nanocrystal based nonvolatile memory arrays using conventional 90nm and 0.25μm process technologies have been produced. The technology can be programmed and erased using conventional techniques in floating gate memories and can substantially reduce the cost of embedded Flash at the 90nm node and beyond.

Original languageEnglish
Pages (from-to)601-604
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
StatePublished - 2003
EventIEEE International Electron Devices Meeting - Washington, DC, United States
Duration: Dec 8 2003Dec 10 2003

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