A CMOS potentiostat for control of integrated MEMS actuators

Somashekar Bangalore Prakash; Pamela Abshire; Mario Urdaneta; Marc Christophersen; Elisabeth Smela

A CMOS potentiostat for control of integrated MEMS actuators

Somashekar Bangalore Prakash
, Pamela Abshire
, Mario Urdaneta
, Marc Christophersen
, Elisabeth Smela

Electrical Engineering

Stony Brook University

University of Maryland, College Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

10 Scopus citations

Abstract

We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-on-a-chip to confine cells and measure signals from them. The design has been fabricated in a commercially available 0.5 μm CMOS process. The fabricated chip has been employed for the control of off-chip electroactive polymer films and micro-actuators.

Original language	English
Title of host publication	ISCAS 2006
Subtitle of host publication	2006 IEEE International Symposium on Circuits and Systems, Proceedings
Pages	5555-5558
Number of pages	4
State	Published - 2006
Event	ISCAS 2006: 2006 IEEE International Symposium on Circuits and Systems - Kos, Greece Duration: May 21 2006 → May 24 2006

Publication series

Name	Proceedings - IEEE International Symposium on Circuits and Systems

Conference

Conference	ISCAS 2006: 2006 IEEE International Symposium on Circuits and Systems
Country/Territory	Greece
City	Kos
Period	05/21/06 → 05/24/06

Cite this

@inproceedings{69f22a3fd30c4e3c849c8b0ee219d06f,

title = "A CMOS potentiostat for control of integrated MEMS actuators",

abstract = "We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-on-a-chip to confine cells and measure signals from them. The design has been fabricated in a commercially available 0.5 μm CMOS process. The fabricated chip has been employed for the control of off-chip electroactive polymer films and micro-actuators.",

author = "Prakash, \{Somashekar Bangalore\} and Pamela Abshire and Mario Urdaneta and Marc Christophersen and Elisabeth Smela",

year = "2006",

language = "English",

isbn = "0780393902",

series = "Proceedings - IEEE International Symposium on Circuits and Systems",

pages = "5555--5558",

booktitle = "ISCAS 2006",

note = "ISCAS 2006: 2006 IEEE International Symposium on Circuits and Systems ; Conference date: 21-05-2006 Through 24-05-2006",

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Prakash, SB, Abshire, P, Urdaneta, M, Christophersen, M & Smela, E 2006, A CMOS potentiostat for control of integrated MEMS actuators. in ISCAS 2006: 2006 IEEE International Symposium on Circuits and Systems, Proceedings., 1693893, Proceedings - IEEE International Symposium on Circuits and Systems, pp. 5555-5558, ISCAS 2006: 2006 IEEE International Symposium on Circuits and Systems, Kos, Greece, 05/21/06.

A CMOS potentiostat for control of integrated MEMS actuators. / Prakash, Somashekar Bangalore; Abshire, Pamela; Urdaneta, Mario et al.
ISCAS 2006: 2006 IEEE International Symposium on Circuits and Systems, Proceedings. 2006. p. 5555-5558 1693893 (Proceedings - IEEE International Symposium on Circuits and Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A CMOS potentiostat for control of integrated MEMS actuators

AU - Prakash, Somashekar Bangalore

AU - Abshire, Pamela

AU - Urdaneta, Mario

AU - Christophersen, Marc

AU - Smela, Elisabeth

PY - 2006

Y1 - 2006

N2 - We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-on-a-chip to confine cells and measure signals from them. The design has been fabricated in a commercially available 0.5 μm CMOS process. The fabricated chip has been employed for the control of off-chip electroactive polymer films and micro-actuators.

AB - We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-on-a-chip to confine cells and measure signals from them. The design has been fabricated in a commercially available 0.5 μm CMOS process. The fabricated chip has been employed for the control of off-chip electroactive polymer films and micro-actuators.

UR - https://www.scopus.com/pages/publications/34547258552

M3 - Conference contribution

SN - 0780393902

SN - 9780780393905

T3 - Proceedings - IEEE International Symposium on Circuits and Systems

SP - 5555

EP - 5558

BT - ISCAS 2006

T2 - ISCAS 2006: 2006 IEEE International Symposium on Circuits and Systems

Y2 - 21 May 2006 through 24 May 2006

ER -

A CMOS potentiostat for control of integrated MEMS actuators

Abstract

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