A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Wencheng Xu; Seokheun Choi; Junseok Chae

doi:10.1063/1.3309586

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Wencheng Xu
, Seokheun Choi
, Junseok Chae

Electrical and Computer Eng

Binghamton University

Arizona State University

Research output: Contribution to journal › Article › peer-review

67 Scopus citations

Abstract

This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm².

Original language	English
Article number	053703
Journal	Applied Physics Letters
Volume	96
Issue number	5
DOIs	https://doi.org/10.1063/1.3309586
State	Published - 2010

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abstract = "This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm2.",

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AB - This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/ cm2.

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A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

Abstract

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