TY - GEN
T1 - A flow-sensing velocity microphone
AU - Miles, Ronald N.
AU - Farahikia, Mahdi
AU - Leahy, Stephane
AU - Aziz, Ahmed Abdel
N1 - Publisher Copyright: © 2019 IEEE.
PY - 2019/10
Y1 - 2019/10
N2 - A microphone is described having a sensing element driven by viscous forces due to the fluctuating velocity of the air in a sound field. Unlike typical microphones having pressure-sensing diaphragm, thin microfabricated beams or thin porous plates are used to detect acoustic flow. The structures are designed to maximize the effects of viscosity on their motion. To transduce the motion into an electronic signal, a new capacitive sensing approach is utilized that imposes minimal electrostatic force, enabling the sensor to be highly compliant without being affected by the use of large bias voltages.
AB - A microphone is described having a sensing element driven by viscous forces due to the fluctuating velocity of the air in a sound field. Unlike typical microphones having pressure-sensing diaphragm, thin microfabricated beams or thin porous plates are used to detect acoustic flow. The structures are designed to maximize the effects of viscosity on their motion. To transduce the motion into an electronic signal, a new capacitive sensing approach is utilized that imposes minimal electrostatic force, enabling the sensor to be highly compliant without being affected by the use of large bias voltages.
UR - https://www.scopus.com/pages/publications/85078699708
U2 - 10.1109/SENSORS43011.2019.8956947
DO - 10.1109/SENSORS43011.2019.8956947
M3 - Conference contribution
T3 - Proceedings of IEEE Sensors
BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th IEEE Sensors, SENSORS 2019
Y2 - 27 October 2019 through 30 October 2019
ER -