A high-quality-factor film bulk acoustic resonator in liquid for biosensing applications

Wencheng Xu; Xu Zhang; Seokheun Choi; Junseok Chae

doi:10.1109/JMEMS.2010.2093568

A high-quality-factor film bulk acoustic resonator in liquid for biosensing applications

Wencheng Xu
, Xu Zhang
, Seokheun Choi
, Junseok Chae

Electrical and Computer Eng

Binghamton University

Arizona State University

Research output: Contribution to journal › Article › peer-review

52 Scopus citations

Abstract

We report a high-quality-factor (Q) film bulk acoustic resonator (FBAR) operating in liquid environments. By integrating a microfluidic channel to a longitudinal-mode FBAR, a Q of up to 150 is achieved with direct liquid contacting. A transmission line model is used to theoretically predict the Q behavior of the FBAR. The model suggests an oscillatory pattern of Q as a function of the channel thickness and the acoustic wavelength in the liquid, which is experimentally verified by precisely controlling the channel thickness. This FBAR biosensor is characterized in liquids for the real-time in situ monitoring of the competitive adsorption/exchange of proteins, the Vroman effect. The FBAR offers a minimum detectable mass of 1.35 ng² and is successfully implemented in a Pierce oscillator as a portable sensing module.

Original language	English
Article number	5668490
Pages (from-to)	213-220
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	20
Issue number	1
DOIs	https://doi.org/10.1109/JMEMS.2010.2093568
State	Published - Feb 2011

Keywords

Acoustic resonators
Q factor
biomedical transducers
piezoelectric resonators

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10.1109/JMEMS.2010.2093568

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abstract = "We report a high-quality-factor (Q) film bulk acoustic resonator (FBAR) operating in liquid environments. By integrating a microfluidic channel to a longitudinal-mode FBAR, a Q of up to 150 is achieved with direct liquid contacting. A transmission line model is used to theoretically predict the Q behavior of the FBAR. The model suggests an oscillatory pattern of Q as a function of the channel thickness and the acoustic wavelength in the liquid, which is experimentally verified by precisely controlling the channel thickness. This FBAR biosensor is characterized in liquids for the real-time in situ monitoring of the competitive adsorption/exchange of proteins, the Vroman effect. The FBAR offers a minimum detectable mass of 1.35 ng2 and is successfully implemented in a Pierce oscillator as a portable sensing module.",

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AU - Zhang, Xu

AU - Choi, Seokheun

AU - Chae, Junseok

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Y1 - 2011/2

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AB - We report a high-quality-factor (Q) film bulk acoustic resonator (FBAR) operating in liquid environments. By integrating a microfluidic channel to a longitudinal-mode FBAR, a Q of up to 150 is achieved with direct liquid contacting. A transmission line model is used to theoretically predict the Q behavior of the FBAR. The model suggests an oscillatory pattern of Q as a function of the channel thickness and the acoustic wavelength in the liquid, which is experimentally verified by precisely controlling the channel thickness. This FBAR biosensor is characterized in liquids for the real-time in situ monitoring of the competitive adsorption/exchange of proteins, the Vroman effect. The FBAR offers a minimum detectable mass of 1.35 ng2 and is successfully implemented in a Pierce oscillator as a portable sensing module.

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KW - piezoelectric resonators

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ER -

A high-quality-factor film bulk acoustic resonator in liquid for biosensing applications

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Keywords

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