@inproceedings{f368985748a345e992a39f13135c7554,
title = "A Terahertz Direct Detector in 22nm FD-SOI CMOS",
abstract = " This paper reports on the design and characterization of a CMOS based direct terahertz detector in an advanced 22nm FD-SOI technology. The nFET detector is implemented with an on-chip ring antenna fully compliant with the technology density rules. At 0.855 THz, a maximum optical responsivity and a minimum noise equivalent power (NEP) of 1.51 kV/W and 22.65 pW/HZ 1/2 respectively were measured in a voltage mode readout at a chopping frequency of 3 kHz. In the current mode readout, a maximum responsivity of 180 mA/W and minimum NEP of 12 pW/HZ 1/2 were measured at a chopping frequency of 120 kHz. Additionally, the effect of transistor back-gate biasing on the detector responsivity is also characterized. The detector sensitivity is comparable to the best reported room-temperature THz direct detectors in any silicon integrated technology, along with the highest reported RF operational bandwidth with NEP below 40 pW/HZ 1/2 in the measured frequency band of 0.7-1 THz.",
keywords = "22FDX, 22nm, CMOS, FD-SOI, NEP, Terahertz detector, on-chip antenna",
author = "Ritesh Jain and Robin Zatta and Janusz Grzyb and David Harame and Pfeiffer, \{Ullrich R.\}",
note = "Publisher Copyright: {\textcopyright} 2018 European Microwave Association - EuMA.; 13th European Microwave Integrated Circuits Conference, EuMIC 2018 ; Conference date: 24-09-2018 Through 25-09-2018",
year = "2018",
month = nov,
day = "16",
doi = "10.23919/EuMIC.2018.8539908",
language = "English",
series = "EuMIC 2018 - 2018 13th European Microwave Integrated Circuits Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "25--28",
booktitle = "EuMIC 2018 - 2018 13th European Microwave Integrated Circuits Conference",
}