A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Ankur Jain; Anthony Kopa; Yingtian Pan; Gary K. Feeder; Huikai Xie

doi:10.1109/JSTQE.2004.829194

A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Ankur Jain
, Anthony Kopa
, Yingtian Pan
, Gary K. Feeder
, Huikai Xie

Biomedical Engineering

Stony Brook University

Research output: Contribution to journal › Article › peer-review

143 Scopus citations

Abstract

This paper reports a 1-mm², two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.

Original language	English
Pages (from-to)	636-642
Number of pages	7
Journal	IEEE Journal of Selected Topics in Quantum Electronics
Volume	10
Issue number	3
DOIs	https://doi.org/10.1109/JSTQE.2004.829194
State	Published - May 2004

Keywords

Electrothermal actuation
Microactuators
Optical coherence tomography
Optical scanners
Two-dimensional (2-D) mirrors

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10.1109/JSTQE.2004.829194

Cite this

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title = "A two-axis electrothermal micromirror for endoscopic optical coherence tomography",

abstract = "This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.",

keywords = "Electrothermal actuation, Microactuators, Optical coherence tomography, Optical scanners, Two-dimensional (2-D) mirrors",

author = "Ankur Jain and Anthony Kopa and Yingtian Pan and Feeder, \{Gary K.\} and Huikai Xie",

year = "2004",

month = may,

doi = "10.1109/JSTQE.2004.829194",

language = "English",

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T1 - A two-axis electrothermal micromirror for endoscopic optical coherence tomography

AU - Jain, Ankur

AU - Kopa, Anthony

AU - Pan, Yingtian

AU - Feeder, Gary K.

AU - Xie, Huikai

PY - 2004/5

Y1 - 2004/5

N2 - This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.

AB - This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.

KW - Electrothermal actuation

KW - Microactuators

KW - Optical coherence tomography

KW - Optical scanners

KW - Two-dimensional (2-D) mirrors

UR - https://www.scopus.com/pages/publications/4344565790

U2 - 10.1109/JSTQE.2004.829194

DO - 10.1109/JSTQE.2004.829194

M3 - Article

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VL - 10

SP - 636

EP - 642

JO - IEEE Journal of Selected Topics in Quantum Electronics

JF - IEEE Journal of Selected Topics in Quantum Electronics

IS - 3

ER -

A two-axis electrothermal micromirror for endoscopic optical coherence tomography

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Keywords

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