ADVANTAGES OF MIS PROCESSING ON PASSIVATED POLYCRYSTALLINE SILICON.

G. Rajeswaran; M. Thayer; V. J. Rao; W. A. Anderson

ADVANTAGES OF MIS PROCESSING ON PASSIVATED POLYCRYSTALLINE SILICON.

G. Rajeswaran
, M. Thayer
, V. J. Rao
, W. A. Anderson

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Materials Research Society Symposia Proceedings
Publisher	Elsevier Science Publ Co
Pages	235-240
Number of pages	6
ISBN (Print)	0444006974
State	Published - 1982

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	5

Cite this

@inproceedings{3d785fdf20ff4da6824f0b8de9f9d62f,

title = "ADVANTAGES OF MIS PROCESSING ON PASSIVATED POLYCRYSTALLINE SILICON.",

author = "G. Rajeswaran and M. Thayer and Rao, \{V. J.\} and Anderson, \{W. A.\}",

year = "1982",

language = "English",

isbn = "0444006974",

series = "Materials Research Society Symposia Proceedings",

publisher = "Elsevier Science Publ Co",

pages = "235--240",

booktitle = "Materials Research Society Symposia Proceedings",

}

ADVANTAGES OF MIS PROCESSING ON PASSIVATED POLYCRYSTALLINE SILICON. / Rajeswaran, G.; Thayer, M.; Rao, V. J. et al.
Materials Research Society Symposia Proceedings. Elsevier Science Publ Co, 1982. p. 235-240 (Materials Research Society Symposia Proceedings; Vol. 5).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - ADVANTAGES OF MIS PROCESSING ON PASSIVATED POLYCRYSTALLINE SILICON.

AU - Rajeswaran, G.

AU - Thayer, M.

AU - Rao, V. J.

AU - Anderson, W. A.

PY - 1982

Y1 - 1982

UR - https://www.scopus.com/pages/publications/0020271281

M3 - Conference contribution

SN - 0444006974

T3 - Materials Research Society Symposia Proceedings

SP - 235

EP - 240

BT - Materials Research Society Symposia Proceedings

PB - Elsevier Science Publ Co

ER -

ADVANTAGES OF MIS PROCESSING ON PASSIVATED POLYCRYSTALLINE SILICON.

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