An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures

J. Lou; S. Allameh; T. Buccheit; W. O. Soboyejo

doi:10.1023/A:1026373421124

An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures

J. Lou
, S. Allameh
, T. Buccheit
, W. O. Soboyejo

President

SUNY Polytechnic Institute

Research output: Contribution to journal › Article › peer-review

43 Scopus citations

Abstract

This paper examines the effects of thickness on the mechanical properties of LIGA Ni MEMS structures plated from sulfamate baths. The as-plated LIGA Ni specimens of different thickness (50 μm, 100 μm and 200 μm) were utilized in the microtensile experiments. Optical microscopy, orientation imaging microscopy and scanning electron microscopy were used to characterize the microstructure of the LIGA Ni specimens. Fracture Modes obtained from specimens with different thickness were revealed by scanning electron microscopy. The effects of specimen thickness are then discussed within the context of strain gradient plasticity theories.

Original language	English
Pages (from-to)	4129-4135
Number of pages	7
Journal	Journal of Materials Science
Volume	38
Issue number	20
DOIs	https://doi.org/10.1023/A:1026373421124
State	Published - Oct 15 2003

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abstract = "This paper examines the effects of thickness on the mechanical properties of LIGA Ni MEMS structures plated from sulfamate baths. The as-plated LIGA Ni specimens of different thickness (50 μm, 100 μm and 200 μm) were utilized in the microtensile experiments. Optical microscopy, orientation imaging microscopy and scanning electron microscopy were used to characterize the microstructure of the LIGA Ni specimens. Fracture Modes obtained from specimens with different thickness were revealed by scanning electron microscopy. The effects of specimen thickness are then discussed within the context of strain gradient plasticity theories.",

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N2 - This paper examines the effects of thickness on the mechanical properties of LIGA Ni MEMS structures plated from sulfamate baths. The as-plated LIGA Ni specimens of different thickness (50 μm, 100 μm and 200 μm) were utilized in the microtensile experiments. Optical microscopy, orientation imaging microscopy and scanning electron microscopy were used to characterize the microstructure of the LIGA Ni specimens. Fracture Modes obtained from specimens with different thickness were revealed by scanning electron microscopy. The effects of specimen thickness are then discussed within the context of strain gradient plasticity theories.

AB - This paper examines the effects of thickness on the mechanical properties of LIGA Ni MEMS structures plated from sulfamate baths. The as-plated LIGA Ni specimens of different thickness (50 μm, 100 μm and 200 μm) were utilized in the microtensile experiments. Optical microscopy, orientation imaging microscopy and scanning electron microscopy were used to characterize the microstructure of the LIGA Ni specimens. Fracture Modes obtained from specimens with different thickness were revealed by scanning electron microscopy. The effects of specimen thickness are then discussed within the context of strain gradient plasticity theories.

UR - https://www.scopus.com/pages/publications/0344584821

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DO - 10.1023/A:1026373421124

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JO - Journal of Materials Science

JF - Journal of Materials Science

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ER -

An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures

Abstract

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