TY - GEN
T1 - Analysis of active damping of a silicon microphone using a linear controller
AU - Qu, Jinli
AU - Wu, N. E.
AU - Miles, Ronald N.
AU - Vargas, Henik
PY - 2008
Y1 - 2008
N2 - This paper presents a model of a silicon microphone with active electronic damping. The microphone has low passive damping to minimize thermal noise, and employs active damping from electrostatic actuation to improve its dynamic performance. To apply the linear robust control approach, the nonlinear dynamic system is modeled as a linear system with bounded parameters, and a controller is designed using the H∞ method which successfully drives the electrostatic actuator to generate the desired active damping. The effectiveness of the controller has been verified through simulation in both frequency and time domains.
AB - This paper presents a model of a silicon microphone with active electronic damping. The microphone has low passive damping to minimize thermal noise, and employs active damping from electrostatic actuation to improve its dynamic performance. To apply the linear robust control approach, the nonlinear dynamic system is modeled as a linear system with bounded parameters, and a controller is designed using the H∞ method which successfully drives the electrostatic actuator to generate the desired active damping. The effectiveness of the controller has been verified through simulation in both frequency and time domains.
UR - https://www.scopus.com/pages/publications/52449084224
U2 - 10.1109/ACC.2008.4587080
DO - 10.1109/ACC.2008.4587080
M3 - Conference contribution
SN - 9781424420797
T3 - Proceedings of the American Control Conference
SP - 3767
EP - 3773
BT - 2008 American Control Conference, ACC
T2 - 2008 American Control Conference, ACC
Y2 - 11 June 2008 through 13 June 2008
ER -