Atomic Layer Deposition of SnO2 for selective room temperature low ppb level O3 sensing

Steven Mills; Michael Lim; Bongmook Lee; Veena Misra

doi:10.1149/2.0111510jss

Atomic Layer Deposition of SnO₂ for selective room temperature low ppb level O₃ sensing

Steven Mills
, Michael Lim
, Bongmook Lee
, Veena Misra

College of Engineering

SUNY Polytechnic Institute

North Carolina State University

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO₂ enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO₂ ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems.

Original language	English
Pages (from-to)	S3059-S3061
Journal	ECS Journal of Solid State Science and Technology
Volume	4
Issue number	10
DOIs	https://doi.org/10.1149/2.0111510jss
State	Published - 2015

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abstract = "This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems.",

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AU - Lee, Bongmook

AU - Misra, Veena

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AB - This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems.

UR - https://www.scopus.com/pages/publications/84942564369

U2 - 10.1149/2.0111510jss

DO - 10.1149/2.0111510jss

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JO - ECS Journal of Solid State Science and Technology

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IS - 10

ER -

Atomic Layer Deposition of SnO₂ for selective room temperature low ppb level O₃ sensing

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