Automated mapping of micropipes in SiC wafers using polarized-light microscope

Sean McGuire; Robert Blasi; Ping Wu; Efstathios Loukas; Ejiro Emorhokpor; Svetoslav Dimov; Xueping Xu; Jian Qiu Guo; Yu Yang; Balaji Raghothamachar; Michael Dudley

doi:10.4028/www.scientific.net/MSF.924.527

Automated mapping of micropipes in SiC wafers using polarized-light microscope

Sean McGuire
, Robert Blasi
, Ping Wu
, Efstathios Loukas
, Ejiro Emorhokpor
, Svetoslav Dimov
, Xueping Xu
, Jian Qiu Guo
, Yu Yang
, Balaji Raghothamachar
, Michael Dudley

Materials Science and Engineering

Stony Brook University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

We have developed a process that is able to detect, count, and map micropipes on SiC substrates. This process uses a polarized light microscope to scan the wafer. The pictures taken are analyzed with a program that produces a micropipe map as well as numerical defect distribution data in a text file. The results of the process were validated with x-ray topography measurement. The repeatability of this process is also studied and reported.

Original language	English
Title of host publication	Silicon Carbide and Related Materials, 2017
Editors	Robert Stahlbush, Philip Neudeck, Anup Bhalla, Robert P. Devaty, Michael Dudley, Aivars Lelis
Publisher	Trans Tech Publications Ltd
Pages	527-530
Number of pages	4
ISBN (Print)	9783035711455
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.924.527
State	Published - 2018
Event	International Conference on Silicon Carbide and Related Materials, ICSCRM 2017 - Columbia, United States Duration: Sep 17 2017 → Sep 22 2017

Publication series

Name	Materials Science Forum
Volume	924 MSF

Conference

Conference	International Conference on Silicon Carbide and Related Materials, ICSCRM 2017
Country/Territory	United States
City	Columbia
Period	09/17/17 → 09/22/17

Keywords

Characterization
Defect counting
Micropipe
Micropipe density
Non-destructive
SiC

Access to Document

10.4028/www.scientific.net/MSF.924.527

Cite this

McGuire, S., Blasi, R., Wu, P., Loukas, E., Emorhokpor, E., Dimov, S., Xu, X., Guo, J. Q., Yang, Y., Raghothamachar, B., & Dudley, M. (2018). Automated mapping of micropipes in SiC wafers using polarized-light microscope. In R. Stahlbush, P. Neudeck, A. Bhalla, R. P. Devaty, M. Dudley, & A. Lelis (Eds.), Silicon Carbide and Related Materials, 2017 (pp. 527-530). (Materials Science Forum; Vol. 924 MSF). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.924.527

@inproceedings{a05de48ed8b74eb9a0ce1b1d7f69e6ac,

title = "Automated mapping of micropipes in SiC wafers using polarized-light microscope",

abstract = "We have developed a process that is able to detect, count, and map micropipes on SiC substrates. This process uses a polarized light microscope to scan the wafer. The pictures taken are analyzed with a program that produces a micropipe map as well as numerical defect distribution data in a text file. The results of the process were validated with x-ray topography measurement. The repeatability of this process is also studied and reported.",

keywords = "Characterization, Defect counting, Micropipe, Micropipe density, Non-destructive, SiC",

author = "Sean McGuire and Robert Blasi and Ping Wu and Efstathios Loukas and Ejiro Emorhokpor and Svetoslav Dimov and Xueping Xu and Guo, \{Jian Qiu\} and Yu Yang and Balaji Raghothamachar and Michael Dudley",

note = "Publisher Copyright: {\textcopyright} 2018 Trans Tech Publications, Switzerland.; International Conference on Silicon Carbide and Related Materials, ICSCRM 2017 ; Conference date: 17-09-2017 Through 22-09-2017",

year = "2018",

doi = "10.4028/www.scientific.net/MSF.924.527",

language = "English",

isbn = "9783035711455",

series = "Materials Science Forum",

publisher = "Trans Tech Publications Ltd",

pages = "527--530",

editor = "Robert Stahlbush and Philip Neudeck and Anup Bhalla and Devaty, \{Robert P.\} and Michael Dudley and Aivars Lelis",

booktitle = "Silicon Carbide and Related Materials, 2017",

}

McGuire, S, Blasi, R, Wu, P, Loukas, E, Emorhokpor, E, Dimov, S, Xu, X, Guo, JQ, Yang, Y, Raghothamachar, B & Dudley, M 2018, Automated mapping of micropipes in SiC wafers using polarized-light microscope. in R Stahlbush, P Neudeck, A Bhalla, RP Devaty, M Dudley & A Lelis (eds), Silicon Carbide and Related Materials, 2017. Materials Science Forum, vol. 924 MSF, Trans Tech Publications Ltd, pp. 527-530, International Conference on Silicon Carbide and Related Materials, ICSCRM 2017, Columbia, United States, 09/17/17. https://doi.org/10.4028/www.scientific.net/MSF.924.527

Automated mapping of micropipes in SiC wafers using polarized-light microscope. / McGuire, Sean; Blasi, Robert; Wu, Ping et al.
Silicon Carbide and Related Materials, 2017. ed. / Robert Stahlbush; Philip Neudeck; Anup Bhalla; Robert P. Devaty; Michael Dudley; Aivars Lelis. Trans Tech Publications Ltd, 2018. p. 527-530 (Materials Science Forum; Vol. 924 MSF).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Automated mapping of micropipes in SiC wafers using polarized-light microscope

AU - McGuire, Sean

AU - Blasi, Robert

AU - Wu, Ping

AU - Loukas, Efstathios

AU - Emorhokpor, Ejiro

AU - Dimov, Svetoslav

AU - Xu, Xueping

AU - Guo, Jian Qiu

AU - Yang, Yu

AU - Raghothamachar, Balaji

AU - Dudley, Michael

PY - 2018

Y1 - 2018

N2 - We have developed a process that is able to detect, count, and map micropipes on SiC substrates. This process uses a polarized light microscope to scan the wafer. The pictures taken are analyzed with a program that produces a micropipe map as well as numerical defect distribution data in a text file. The results of the process were validated with x-ray topography measurement. The repeatability of this process is also studied and reported.

AB - We have developed a process that is able to detect, count, and map micropipes on SiC substrates. This process uses a polarized light microscope to scan the wafer. The pictures taken are analyzed with a program that produces a micropipe map as well as numerical defect distribution data in a text file. The results of the process were validated with x-ray topography measurement. The repeatability of this process is also studied and reported.

KW - Characterization

KW - Defect counting

KW - Micropipe

KW - Micropipe density

KW - Non-destructive

KW - SiC

UR - https://www.scopus.com/pages/publications/85049030540

U2 - 10.4028/www.scientific.net/MSF.924.527

DO - 10.4028/www.scientific.net/MSF.924.527

M3 - Conference contribution

SN - 9783035711455

T3 - Materials Science Forum

SP - 527

EP - 530

BT - Silicon Carbide and Related Materials, 2017

A2 - Stahlbush, Robert

A2 - Neudeck, Philip

A2 - Bhalla, Anup

A2 - Devaty, Robert P.

A2 - Dudley, Michael

A2 - Lelis, Aivars

PB - Trans Tech Publications Ltd

T2 - International Conference on Silicon Carbide and Related Materials, ICSCRM 2017

Y2 - 17 September 2017 through 22 September 2017

ER -

McGuire S, Blasi R, Wu P, Loukas E, Emorhokpor E, Dimov S et al. Automated mapping of micropipes in SiC wafers using polarized-light microscope. In Stahlbush R, Neudeck P, Bhalla A, Devaty RP, Dudley M, Lelis A, editors, Silicon Carbide and Related Materials, 2017. Trans Tech Publications Ltd. 2018. p. 527-530. (Materials Science Forum). doi: 10.4028/www.scientific.net/MSF.924.527

Automated mapping of micropipes in SiC wafers using polarized-light microscope

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Keywords

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