Comparison of EBSD patterns simulated by two multislice methods

The extraction of crystallography information from electron backscatter diffraction (EBSD) patterns can be facilitated by diffraction simulations based on the dynamical electron diffraction theory. In this work, the EBSD patterns are successfully simulated by two multislice methods, that is, the real space (RS) method and the revised real space (RRS) method. The calculation results by the two multislice methods are compared and analyzed in detail with respect to different accelerating voltages, Debye–Waller factors and aperture radii. It is found that the RRS method provides a larger view field of the EBSD patterns than that by the RS method under the same calculation conditions. Moreover, the Kikuchi bands of the EBSD patterns obtained by the RRS method have a better match with the experimental patterns than those by the RS method. Especially, the lattice parameters obtained by the RRS method are more accurate than those by the RS method. These results demonstrate that the RRS method is more accurate for simulating the EBSD patterns than the RS method within the accepted computation time.