Compositional and structural changes in LiNbO 3 following deep He + ion implantation for film exfoliation

Ryan M. Roth; Djordje Djukic; Yoo Seung Lee; Richard M. Osgood; Sasha Bakhru; Bryan Laulicht; Kathleen Dunn; Hassaram Bakhru; Liqi Wu; Mengbing Huang

doi:10.1063/1.2352798

Compositional and structural changes in LiNbO ₃ following deep He ⁺ ion implantation for film exfoliation

Ryan M. Roth
, Djordje Djukic
, Yoo Seung Lee
, Richard M. Osgood
, Sasha Bakhru
, Bryan Laulicht
, Kathleen Dunn
, Hassaram Bakhru
, Liqi Wu
, Mengbing Huang

Nanoscale Science and Engineering

University at Albany

Columbia University
SUNY Albany

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

The physical mechanism of He-ion-based exfoliation in Z-cut LiNbO ₃ is investigated. Rutherford backscattering/channeling, nuclear-reaction analysis, and transmission electron microscopy are used to examine the compositional and structural changes caused by deep ion implantation followed by thermal annealing. Lattice disruption, He-bubble formation, and Li depletion are observed in the implantation region, as well as the onset of exfoliation. The implications of these observations for the crystal ion slicing method are discussed.

Original language	English
Article number	112906
Journal	Applied Physics Letters
Volume	89
Issue number	11
DOIs	https://doi.org/10.1063/1.2352798
State	Published - 2006

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title = "Compositional and structural changes in LiNbO 3 following deep He + ion implantation for film exfoliation",

abstract = "The physical mechanism of He-ion-based exfoliation in Z-cut LiNbO 3 is investigated. Rutherford backscattering/channeling, nuclear-reaction analysis, and transmission electron microscopy are used to examine the compositional and structural changes caused by deep ion implantation followed by thermal annealing. Lattice disruption, He-bubble formation, and Li depletion are observed in the implantation region, as well as the onset of exfoliation. The implications of these observations for the crystal ion slicing method are discussed.",

author = "Roth, \{Ryan M.\} and Djordje Djukic and Lee, \{Yoo Seung\} and Osgood, \{Richard M.\} and Sasha Bakhru and Bryan Laulicht and Kathleen Dunn and Hassaram Bakhru and Liqi Wu and Mengbing Huang",

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doi = "10.1063/1.2352798",

language = "English",

volume = "89",

journal = "Applied Physics Letters",

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T1 - Compositional and structural changes in LiNbO 3 following deep He + ion implantation for film exfoliation

AU - Roth, Ryan M.

AU - Djukic, Djordje

AU - Lee, Yoo Seung

AU - Osgood, Richard M.

AU - Bakhru, Sasha

AU - Laulicht, Bryan

AU - Dunn, Kathleen

AU - Bakhru, Hassaram

AU - Wu, Liqi

AU - Huang, Mengbing

PY - 2006

Y1 - 2006

N2 - The physical mechanism of He-ion-based exfoliation in Z-cut LiNbO 3 is investigated. Rutherford backscattering/channeling, nuclear-reaction analysis, and transmission electron microscopy are used to examine the compositional and structural changes caused by deep ion implantation followed by thermal annealing. Lattice disruption, He-bubble formation, and Li depletion are observed in the implantation region, as well as the onset of exfoliation. The implications of these observations for the crystal ion slicing method are discussed.

AB - The physical mechanism of He-ion-based exfoliation in Z-cut LiNbO 3 is investigated. Rutherford backscattering/channeling, nuclear-reaction analysis, and transmission electron microscopy are used to examine the compositional and structural changes caused by deep ion implantation followed by thermal annealing. Lattice disruption, He-bubble formation, and Li depletion are observed in the implantation region, as well as the onset of exfoliation. The implications of these observations for the crystal ion slicing method are discussed.

UR - https://www.scopus.com/pages/publications/33748698271

U2 - 10.1063/1.2352798

DO - 10.1063/1.2352798

M3 - Article

SN - 0003-6951

VL - 89

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

M1 - 112906

ER -

Compositional and structural changes in LiNbO ₃ following deep He ⁺ ion implantation for film exfoliation

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