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Defect structures of B12As2 epilayers grown on c-plane and a-plane 6H-SiC substrates

  • Hui Chen
  • , Guan Wang
  • , Michael Dudley
  • , Lihua Zhang
  • , Yimei Zhu
  • , Yi Zhang
  • , James H. Edgar
  • , Martin Kuball
  • Stony Brook University
  • Brookhaven National Laboratory
  • Kansas State University
  • University of Bristol

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

B12As2 epitaxial layers grown on (0001) 6H-SiC and (112̄0) 6H-SiC substrates have been studied using scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM) and synchrotron white beam x-ray topography (SWBXT) and investigated with the aid of crystal structure visualization software. SWBXT showed that B 12As2 adopted [111] growth orientation, parallel to [0001]SiC, on c-plane 6H-SiC and adopted [101̄] growth orientation, parallel to [112̄0 ]SiC, on a-plane 6H-SiC However, SWBXT also revealed twins in both sets of the B12As2 films, consistent with the SEM observation of the surface morphology. Cross-sectional HRTEM also confirmed the presence of twins in both cases and also revealed the existence of an intermediate layer between the c-plane 6H-SiC and the B12As2 film, the latter being consistent with the result reported by Michael etc[1]. By correlating the HRTEM observations and crystal structure visualization, the atomic configurations across the twin boundaries in both samples as well as those in the intermediate layer in the c-plane sample are proposed.

Original languageEnglish
Title of host publicationSemiconductor Defect Engineering - Materials, Synthetic Structures and Devices II
Pages29-34
Number of pages6
StatePublished - 2007
EventSemiconductor Defect Engineering - Materials, Synthetic Structures and Devices II - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

Publication series

NameMaterials Research Society Symposium Proceedings
Volume994

Conference

ConferenceSemiconductor Defect Engineering - Materials, Synthetic Structures and Devices II
Country/TerritoryUnited States
CitySan Francisco, CA
Period04/9/0704/13/07

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