TY - GEN
T1 - Defect structures of B12As2 epilayers grown on c-plane and a-plane 6H-SiC substrates
AU - Chen, Hui
AU - Wang, Guan
AU - Dudley, Michael
AU - Zhang, Lihua
AU - Zhu, Yimei
AU - Zhang, Yi
AU - Edgar, James H.
AU - Kuball, Martin
PY - 2007
Y1 - 2007
N2 - B12As2 epitaxial layers grown on (0001) 6H-SiC and (112̄0) 6H-SiC substrates have been studied using scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM) and synchrotron white beam x-ray topography (SWBXT) and investigated with the aid of crystal structure visualization software. SWBXT showed that B 12As2 adopted [111] growth orientation, parallel to [0001]SiC, on c-plane 6H-SiC and adopted [101̄] growth orientation, parallel to [112̄0 ]SiC, on a-plane 6H-SiC However, SWBXT also revealed twins in both sets of the B12As2 films, consistent with the SEM observation of the surface morphology. Cross-sectional HRTEM also confirmed the presence of twins in both cases and also revealed the existence of an intermediate layer between the c-plane 6H-SiC and the B12As2 film, the latter being consistent with the result reported by Michael etc[1]. By correlating the HRTEM observations and crystal structure visualization, the atomic configurations across the twin boundaries in both samples as well as those in the intermediate layer in the c-plane sample are proposed.
AB - B12As2 epitaxial layers grown on (0001) 6H-SiC and (112̄0) 6H-SiC substrates have been studied using scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM) and synchrotron white beam x-ray topography (SWBXT) and investigated with the aid of crystal structure visualization software. SWBXT showed that B 12As2 adopted [111] growth orientation, parallel to [0001]SiC, on c-plane 6H-SiC and adopted [101̄] growth orientation, parallel to [112̄0 ]SiC, on a-plane 6H-SiC However, SWBXT also revealed twins in both sets of the B12As2 films, consistent with the SEM observation of the surface morphology. Cross-sectional HRTEM also confirmed the presence of twins in both cases and also revealed the existence of an intermediate layer between the c-plane 6H-SiC and the B12As2 film, the latter being consistent with the result reported by Michael etc[1]. By correlating the HRTEM observations and crystal structure visualization, the atomic configurations across the twin boundaries in both samples as well as those in the intermediate layer in the c-plane sample are proposed.
UR - https://www.scopus.com/pages/publications/45749137150
M3 - Conference contribution
SN - 9781558999541
T3 - Materials Research Society Symposium Proceedings
SP - 29
EP - 34
BT - Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II
T2 - Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II
Y2 - 9 April 2007 through 13 April 2007
ER -