Depth profiling by ion-beam spectrometry

A procedure is developed for determining the stoichiometry of a sample as function of depth from ion-beam analysis energy spectra. The approach is in principle equally applicable to back scattering experiments, experiments involving nuclear reactions with known cross sections and experiments combining these techniques. The procedure is especially suitable for routine computer evaluation of energy spectra. It is more straightforward and/or involves less rigid assumptions and approximations than alternative approaches. If all elemental signals are measured, an accurate beam dose is not needed. The limitations are basically those inherent to ion beam analysis in general.