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Detection of mercury vapor using resonating microcantilevers

  • T. Thundat
  • , E. A. Wachter
  • , S. L. Sharp
  • , R. J. Warmack

Research output: Contribution to journalArticlepeer-review

437 Scopus citations

Abstract

Oscillating silicon nitride microcantilevers coated with a thin gold film have been used to detect mercury vapor in air. Cantilever resonance frequency changes due to surface mass loading as a result of adsorption of mercury vapor. Furthermore, cantilever bending is also altered due to changes in surface stress induced by mercury adsorption on the gold overlayer. Both of these phenomena can be used to quantitatively detect adsorbed vapors with picogram mass resolution.

Original languageEnglish
Pages (from-to)1695
Number of pages1
JournalApplied Physics Letters
DOIs
StatePublished - 1995

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