Dual-beam focused ion beam: A multifunctional tool for nanotechnology

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	56-57
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	8
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/s1431927602101607
State	Published - 2002

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@article{4c0f5cdcd7684f4eb730eb20b979b21d,

title = "Dual-beam focused ion beam: A multifunctional tool for nanotechnology",

author = "N. Yao and E. Kung and S. Allameh and Soboyejo, \{W. O.\}",

year = "2002",

doi = "10.1017/s1431927602101607",

language = "English",

volume = "8",

pages = "56--57",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

number = "SUPPL. 2",

}

TY - JOUR

T1 - Dual-beam focused ion beam

T2 - A multifunctional tool for nanotechnology

AU - Yao, N.

AU - Kung, E.

AU - Allameh, S.

AU - Soboyejo, W. O.

PY - 2002

Y1 - 2002

UR - https://www.scopus.com/pages/publications/0036425913

U2 - 10.1017/s1431927602101607

DO - 10.1017/s1431927602101607

M3 - Article

SN - 1431-9276

VL - 8

SP - 56

EP - 57

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -