Effects of temperature and pressure on microcantilever resonance response

Johann Mertens; Eric Finot; Thomas Thundat; Arnaud Fabre; Marie Hélène Nadal; Vincent Eyraud; Eric Bourillot

doi:10.1016/S0304-3991(03)00036-6

Effects of temperature and pressure on microcantilever resonance response

Johann Mertens
, Eric Finot
, Thomas Thundat
, Arnaud Fabre
, Marie Hélène Nadal
, Vincent Eyraud
, Eric Bourillot

Department of Chemical and Biological Engineering

University at Buffalo

Université de Bourgogne
Commsrt. à l'Energie Atomique

Research output: Contribution to journal › Article › peer-review

93 Scopus citations

Abstract

The variation in resonance response of microcantilevers was investigated as a function of pressure (10^-2-10⁶Pa) and temperature (290-390K) in atmospheres of helium (He) and dry nitrogen (N₂). Our results for a silicon cantilever under vacuum show that the frequency varies in direct proportion to the temperature. The linear response is explained by the decrease in Young's modulus with increasing the temperature. However, when the cantilever is bimaterial, the response is nonlinear due to differential thermal expansion. Resonance response as a function of pressure shows three different regions, which correspond to molecular flow regime, transition regime, and viscous regime. The deflection in flow transition regime resulting from thermal variation has minimal effect on frequency. The frequency variation of the cantilever is caused mainly by changes in the mean free path of gas molecules.

Original language	English
Pages (from-to)	119-126
Number of pages	8
Journal	Ultramicroscopy
Volume	97
Issue number	1-4
DOIs	https://doi.org/10.1016/S0304-3991(03)00036-6
State	Published - 2003

Keywords

Cantilever
Gas sensor
Knudsen number
Pressure
Temperature

Access to Document

10.1016/S0304-3991(03)00036-6

Cite this

@article{08ca6c173c6f4ed989539f3e82e458ad,

title = "Effects of temperature and pressure on microcantilever resonance response",

abstract = "The variation in resonance response of microcantilevers was investigated as a function of pressure (10-2-106Pa) and temperature (290-390K) in atmospheres of helium (He) and dry nitrogen (N2). Our results for a silicon cantilever under vacuum show that the frequency varies in direct proportion to the temperature. The linear response is explained by the decrease in Young's modulus with increasing the temperature. However, when the cantilever is bimaterial, the response is nonlinear due to differential thermal expansion. Resonance response as a function of pressure shows three different regions, which correspond to molecular flow regime, transition regime, and viscous regime. The deflection in flow transition regime resulting from thermal variation has minimal effect on frequency. The frequency variation of the cantilever is caused mainly by changes in the mean free path of gas molecules.",

keywords = "Cantilever, Gas sensor, Knudsen number, Pressure, Temperature",

author = "Johann Mertens and Eric Finot and Thomas Thundat and Arnaud Fabre and Nadal, \{Marie H{\'e}l{\`e}ne\} and Vincent Eyraud and Eric Bourillot",

year = "2003",

doi = "10.1016/S0304-3991(03)00036-6",

language = "English",

volume = "97",

pages = "119--126",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier B.V.",

number = "1-4",

}

TY - JOUR

T1 - Effects of temperature and pressure on microcantilever resonance response

AU - Mertens, Johann

AU - Finot, Eric

AU - Thundat, Thomas

AU - Fabre, Arnaud

AU - Nadal, Marie Hélène

AU - Eyraud, Vincent

AU - Bourillot, Eric

PY - 2003

Y1 - 2003

N2 - The variation in resonance response of microcantilevers was investigated as a function of pressure (10-2-106Pa) and temperature (290-390K) in atmospheres of helium (He) and dry nitrogen (N2). Our results for a silicon cantilever under vacuum show that the frequency varies in direct proportion to the temperature. The linear response is explained by the decrease in Young's modulus with increasing the temperature. However, when the cantilever is bimaterial, the response is nonlinear due to differential thermal expansion. Resonance response as a function of pressure shows three different regions, which correspond to molecular flow regime, transition regime, and viscous regime. The deflection in flow transition regime resulting from thermal variation has minimal effect on frequency. The frequency variation of the cantilever is caused mainly by changes in the mean free path of gas molecules.

AB - The variation in resonance response of microcantilevers was investigated as a function of pressure (10-2-106Pa) and temperature (290-390K) in atmospheres of helium (He) and dry nitrogen (N2). Our results for a silicon cantilever under vacuum show that the frequency varies in direct proportion to the temperature. The linear response is explained by the decrease in Young's modulus with increasing the temperature. However, when the cantilever is bimaterial, the response is nonlinear due to differential thermal expansion. Resonance response as a function of pressure shows three different regions, which correspond to molecular flow regime, transition regime, and viscous regime. The deflection in flow transition regime resulting from thermal variation has minimal effect on frequency. The frequency variation of the cantilever is caused mainly by changes in the mean free path of gas molecules.

KW - Cantilever

KW - Gas sensor

KW - Knudsen number

KW - Pressure

KW - Temperature

UR - https://www.scopus.com/pages/publications/0038542123

U2 - 10.1016/S0304-3991(03)00036-6

DO - 10.1016/S0304-3991(03)00036-6

M3 - Article

SN - 0304-3991

VL - 97

SP - 119

EP - 126

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 1-4

ER -

Effects of temperature and pressure on microcantilever resonance response

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this