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Effects of thermal annealing on the interface morphology of CdTe/CdS heterojunctions

  • S. Huang
  • , Y. L. Soo
  • , Y. H. Kao
  • , A. D. Compaan

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

The grazing incidence x-ray scattering technique was used to investigate the effects of thermal annealing on CdTe/CdS hetrojunctions. An accurate determination of the individual layer thickness, surface and interfacial roughness, and lateral and cross correlation lengths of layer height fluctuations was made by nondestructive method. The lateral and cross-correlation lengths become shorter with the increase in the annealed temperature. The small values of the texture coefficient indicated ruggedness in the hetrointerfaces.

Original languageEnglish
Pages (from-to)2181-2185
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume19
Issue number5
DOIs
StatePublished - Sep 2001

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