Electron microscopy study of the influence of the adhesion layer for Pt electrode on the microstructure of the sol-gel crystallized PZT

Vidya Kaushik; Papu Manjar; Andrew Campbell; Robert Jones; Reza Moazzami; C. Mogab Joseph; Robert Hance; Ronald Pyle

doi:10.1557/proc-310-209

Electron microscopy study of the influence of the adhesion layer for Pt electrode on the microstructure of the sol-gel crystallized PZT

Vidya Kaushik
, Papu Manjar
, Andrew Campbell
, Robert Jones
, Reza Moazzami
, C. Mogab Joseph
, Robert Hance
, Ronald Pyle

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Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

PZT ferroelectric capacitors are commonly fabricated using Pt electrodes. Crystallization in an oxygen ambient of sol-gel deposited PZT films is influenced by the nature of the adhesion layer used for the Pt electrode. Here we report results of the TEM investigation of the microstructures of PZT crystallized on Pt/Ti and PT/TiO₂ substrates. PZT films on either substrate show a two-phase microstructure consisting of larger perovskite grains and fine-grained (<3nm) pyrochlore matrix. The perovskite grains are dense, free of any porosity and HRTEM shows the observed domains to be 90° twins. EDS spectra detect a lower Pb/Ti ratio for the pyrochlorate matrix compared to the perovskite grains. Differences between the two substrates consist of the perovskite ratio and more importantly the pervoskite grain size.

Original language	English
Pages (from-to)	209-214
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	310
DOIs	https://doi.org/10.1557/proc-310-209
State	Published - 1993
Event	Proceedings of the 1993 Spring Meeting of the Materials Research Society - San Francisco, CA, USA Duration: Apr 16 1993 → Apr 20 1993

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@article{a478842adecb41c383ed0347d5b8b139,

title = "Electron microscopy study of the influence of the adhesion layer for Pt electrode on the microstructure of the sol-gel crystallized PZT",

abstract = "PZT ferroelectric capacitors are commonly fabricated using Pt electrodes. Crystallization in an oxygen ambient of sol-gel deposited PZT films is influenced by the nature of the adhesion layer used for the Pt electrode. Here we report results of the TEM investigation of the microstructures of PZT crystallized on Pt/Ti and PT/TiO2 substrates. PZT films on either substrate show a two-phase microstructure consisting of larger perovskite grains and fine-grained (<3nm) pyrochlore matrix. The perovskite grains are dense, free of any porosity and HRTEM shows the observed domains to be 90° twins. EDS spectra detect a lower Pb/Ti ratio for the pyrochlorate matrix compared to the perovskite grains. Differences between the two substrates consist of the perovskite ratio and more importantly the pervoskite grain size.",

author = "Vidya Kaushik and Papu Manjar and Andrew Campbell and Robert Jones and Reza Moazzami and \{Mogab Joseph\}, C. and Robert Hance and Ronald Pyle",

year = "1993",

doi = "10.1557/proc-310-209",

language = "English",

volume = "310",

pages = "209--214",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

note = "Proceedings of the 1993 Spring Meeting of the Materials Research Society ; Conference date: 16-04-1993 Through 20-04-1993",

}

TY - JOUR

T1 - Electron microscopy study of the influence of the adhesion layer for Pt electrode on the microstructure of the sol-gel crystallized PZT

AU - Kaushik, Vidya

AU - Manjar, Papu

AU - Campbell, Andrew

AU - Jones, Robert

AU - Moazzami, Reza

AU - Mogab Joseph, C.

AU - Hance, Robert

AU - Pyle, Ronald

PY - 1993

Y1 - 1993

N2 - PZT ferroelectric capacitors are commonly fabricated using Pt electrodes. Crystallization in an oxygen ambient of sol-gel deposited PZT films is influenced by the nature of the adhesion layer used for the Pt electrode. Here we report results of the TEM investigation of the microstructures of PZT crystallized on Pt/Ti and PT/TiO2 substrates. PZT films on either substrate show a two-phase microstructure consisting of larger perovskite grains and fine-grained (<3nm) pyrochlore matrix. The perovskite grains are dense, free of any porosity and HRTEM shows the observed domains to be 90° twins. EDS spectra detect a lower Pb/Ti ratio for the pyrochlorate matrix compared to the perovskite grains. Differences between the two substrates consist of the perovskite ratio and more importantly the pervoskite grain size.

AB - PZT ferroelectric capacitors are commonly fabricated using Pt electrodes. Crystallization in an oxygen ambient of sol-gel deposited PZT films is influenced by the nature of the adhesion layer used for the Pt electrode. Here we report results of the TEM investigation of the microstructures of PZT crystallized on Pt/Ti and PT/TiO2 substrates. PZT films on either substrate show a two-phase microstructure consisting of larger perovskite grains and fine-grained (<3nm) pyrochlore matrix. The perovskite grains are dense, free of any porosity and HRTEM shows the observed domains to be 90° twins. EDS spectra detect a lower Pb/Ti ratio for the pyrochlorate matrix compared to the perovskite grains. Differences between the two substrates consist of the perovskite ratio and more importantly the pervoskite grain size.

UR - https://www.scopus.com/pages/publications/0027812140

U2 - 10.1557/proc-310-209

DO - 10.1557/proc-310-209

M3 - Conference article

SN - 0272-9172

VL - 310

SP - 209

EP - 214

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1993 Spring Meeting of the Materials Research Society

Y2 - 16 April 1993 through 20 April 1993

ER -

Electron microscopy study of the influence of the adhesion layer for Pt electrode on the microstructure of the sol-gel crystallized PZT

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