Fast coating of TiO2 on glass by chemical vapor deposition at atmospheric pressure

Weihao Weng; Chenlu Song; Wenjian Weng; Junbo Liu; Yiming Ying; Gaorong Han

Fast coating of TiO₂ on glass by chemical vapor deposition at atmospheric pressure

Weihao Weng
, Chenlu Song
, Wenjian Weng
, Junbo Liu
, Yiming Ying
, Gaorong Han

University at Albany

University at Albany

Zhejiang University

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

TiO₂-based film was fast coated on glass by chemical vapor deposition (CVD) of Ti (OC₃H₇)₄ (TITP) at atmospheric pressure to experimentally simulate the self-cleaning glass production on industrial scale. The microstructures, photo-catalysis and hydrophilicity of the coating were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultraviolet-visible (UV-Vis) transmission spectroscopy. The results show that the substrate temperature and moving speed significantly affect the properties of the coating. For example, at a temperature above 580°C and a moving speed of 1.5 m/min, the fairly smooth and dense coating displays the most favorable property.

Original language	English
Pages (from-to)	16-20
Number of pages	5
Journal	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
Volume	28
Issue number	1
State	Published - Feb 2008

Keywords

APCVD
Coated glass
Self-cleaning
TiO

Cite this

@article{580d52f7bc71484fb0453f9f3173dfca,

title = "Fast coating of TiO2 on glass by chemical vapor deposition at atmospheric pressure",

abstract = "TiO2-based film was fast coated on glass by chemical vapor deposition (CVD) of Ti (OC3H7)4 (TITP) at atmospheric pressure to experimentally simulate the self-cleaning glass production on industrial scale. The microstructures, photo-catalysis and hydrophilicity of the coating were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultraviolet-visible (UV-Vis) transmission spectroscopy. The results show that the substrate temperature and moving speed significantly affect the properties of the coating. For example, at a temperature above 580°C and a moving speed of 1.5 m/min, the fairly smooth and dense coating displays the most favorable property.",

keywords = "APCVD, Coated glass, Self-cleaning, TiO",

author = "Weihao Weng and Chenlu Song and Wenjian Weng and Junbo Liu and Yiming Ying and Gaorong Han",

year = "2008",

month = feb,

language = "English",

volume = "28",

pages = "16--20",

journal = "Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology",

issn = "1672-7126",

publisher = "Chinese Vacuum Society",

number = "1",

}

TY - JOUR

T1 - Fast coating of TiO2 on glass by chemical vapor deposition at atmospheric pressure

AU - Weng, Weihao

AU - Song, Chenlu

AU - Weng, Wenjian

AU - Liu, Junbo

AU - Ying, Yiming

AU - Han, Gaorong

PY - 2008/2

Y1 - 2008/2

N2 - TiO2-based film was fast coated on glass by chemical vapor deposition (CVD) of Ti (OC3H7)4 (TITP) at atmospheric pressure to experimentally simulate the self-cleaning glass production on industrial scale. The microstructures, photo-catalysis and hydrophilicity of the coating were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultraviolet-visible (UV-Vis) transmission spectroscopy. The results show that the substrate temperature and moving speed significantly affect the properties of the coating. For example, at a temperature above 580°C and a moving speed of 1.5 m/min, the fairly smooth and dense coating displays the most favorable property.

AB - TiO2-based film was fast coated on glass by chemical vapor deposition (CVD) of Ti (OC3H7)4 (TITP) at atmospheric pressure to experimentally simulate the self-cleaning glass production on industrial scale. The microstructures, photo-catalysis and hydrophilicity of the coating were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultraviolet-visible (UV-Vis) transmission spectroscopy. The results show that the substrate temperature and moving speed significantly affect the properties of the coating. For example, at a temperature above 580°C and a moving speed of 1.5 m/min, the fairly smooth and dense coating displays the most favorable property.

KW - APCVD

KW - Coated glass

KW - Self-cleaning

KW - TiO

UR - https://www.scopus.com/pages/publications/40749137460

M3 - Article

SN - 1672-7126

VL - 28

SP - 16

EP - 20

JO - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

JF - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

IS - 1

ER -

Fast coating of TiO₂ on glass by chemical vapor deposition at atmospheric pressure

Abstract

Keywords

Other files and links

Fingerprint

Cite this