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Formation of misfit dislocations in thin film heterostructures

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Abstract

Misfit dislocations in thin film heterostructures were investigated. The misfit dislocation network consisted of approximately 60% of 90° dislocations, 40% of 60° dislocations. The 60° dislocation pairs had parallel screw components and as a result they cannot combine to form a 90° dislocation. The changes in the nucleation barrier for the 60° dislocations caused by the interaction with the existing misfit dislocations were also calculated.

Original languageEnglish
Pages (from-to)7122-7127
Number of pages6
JournalJournal of Applied Physics
Volume92
Issue number12
DOIs
StatePublished - Dec 15 2002

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