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Growth of ferroic metal oxide films with desired properties by polymer-assisted deposition

  • SUNY Buffalo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

One of the challenges in chemical solution-based processes for ferroic metal oxide films has been the growth of high-quality epitaxial films with desired physical properties. Here we review the efforts to use polymer-assisted deposition (PAD) for the growth of epitaxial ferroic metal oxide films with desired physical properties. Using epitaxial ferroelectric and ferromagnetic materials as model systems, the process, microstructures, and physical properties of such epitaxial films grown by PAD are elaborated.

Original languageEnglish
Title of host publication2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728181769
DOIs
StatePublished - Apr 8 2021
Event5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021 - Chengdu, China
Duration: Apr 8 2021Apr 11 2021

Publication series

Name2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021

Conference

Conference5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021
Country/TerritoryChina
CityChengdu
Period04/8/2104/11/21

Keywords

  • Ferroic
  • film
  • metal oxide
  • polymer

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