Abstract
Many metal-oxide-semiconductor (MOS) devices rely upon surface passivation for improved performance. An oxide grown in the presence of Cl was evaluated using highly efficient, surface-passivated, photovoltaic cells. The Cl-containing oxide gave increased efficiency, increased stability, and reduced surface-state density. Spectral response, Auger, and secondary ion mass spectrometry (SIMS) data support these conclusions. Preliminary results regarding stoichiometry of the oxide are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 4742-4745 |
| Number of pages | 4 |
| Journal | Journal of Applied Physics |
| Volume | 57 |
| Issue number | 10 |
| DOIs | |
| State | Published - 1985 |
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