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Improved performance of surface-passivated solar cells by chlorine-containing oxides

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Many metal-oxide-semiconductor (MOS) devices rely upon surface passivation for improved performance. An oxide grown in the presence of Cl was evaluated using highly efficient, surface-passivated, photovoltaic cells. The Cl-containing oxide gave increased efficiency, increased stability, and reduced surface-state density. Spectral response, Auger, and secondary ion mass spectrometry (SIMS) data support these conclusions. Preliminary results regarding stoichiometry of the oxide are presented.

Original languageEnglish
Pages (from-to)4742-4745
Number of pages4
JournalJournal of Applied Physics
Volume57
Issue number10
DOIs
StatePublished - 1985

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