@inproceedings{ecfedfe764ef4587a3a31766c091166c,
title = "INFRARED IMAGING USING MICROCANTILEVERS",
abstract = "A micromechanical detector using microcantilever for infrared (IR) radiation is demonstrated. Because of their small size and low thermal mass, these microcantilever IR detectors are promising new family of IR sensors. This novel IR sensor is based on deflection due to IR adsorption induced thermal stress on a bimaterial cantilever which can be monitored with several methods such as optical deflection or piezoresistive. When laser-deflection-monitored Si\textasciicircum{}N\textasciicircum{} microcantilevers coated with a 40nm thick coating of gold were irradiated by a low-power diode laser, the noise equivalent power and specific detectivity, NEP and D* were found to be 173pW/√Hz and 7.18 * 108cm √Hz/W, respectively, when compensation for the laser reflectivity was made.",
author = "Oden, \{Patrick I.\} and Datskos, \{Panos G.\} and Thundat, \{Thomas G.\} and Wachter, \{Eric A.\} and Warmack, \{Robert J.\}",
note = "Publisher Copyright: {\textcopyright} 1996 American Society of Mechanical Engineers (ASME). All rights reserved.; ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996 ; Conference date: 17-11-1996 Through 22-11-1996",
year = "1996",
doi = "10.1115/IMECE1996-1338",
language = "English",
series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",
publisher = "American Society of Mechanical Engineers (ASME)",
pages = "67--75",
booktitle = "Microelectromechanical Systems (MEMS)",
address = "United States",
}