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Intersubband spectroscopy of inversion layers in the principal surfaces of silicon: Many-body and “impurity” effects

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Abstract

Frequency domain studies of intersubband transitions have been carried out with a FIR Fourier Transform Spectrometer. The experimental techniques have been applied to several studies including subband spectroscopy in (100) and vicinal planes, and in (111) and (110) inersion layers as well as the effects of oxide charge on the optical properties of (100) inversion layers.

Original languageEnglish
Pages (from-to)469-480
Number of pages12
JournalSurface Science
Volume98
Issue number1-3
DOIs
StatePublished - 1980

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