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Low-noise chemical detection with a piezoresistive microcantilever array

  • Arnab Choudhury
  • , S. Ryan Newcomb
  • , Peter J. Hesketh
  • , Zhiyu Hu
  • , Thomas Thundat

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

Piezoresistive microcantilever systems are well suited for chemical sensing with low detection limits. A major hurdle in the realization of such systems is measurement noise associated with DC piezoresistance measurements. A piezoresistive microcantilever array has been fabricated and phase sensitive detection methods are used for realization of a low detection limit piezoresistive cantilever array. Reference cantilevers in the array can act as thermomechanical or chemical references to aid in lowering the detection limits. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationChemical Sensors 7 -and- MEMS/NEMS 7
PublisherElectrochemical Society Inc.
Pages473-482
Number of pages10
Edition10
ISBN (Electronic)1566775108
DOIs
StatePublished - 2006
EventChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: Oct 29 2006Nov 3 2006

Publication series

NameECS Transactions
Number10
Volume3

Conference

ConferenceChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting
Country/TerritoryMexico
CityCancun
Period10/29/0611/3/06

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