Micro- and nano-mechanical behavior of diamondlike carbon containing foreign atoms prepared by pulsed laser deposition

We have prepared diamondlike carbon (DLC) films using KrF excimer pulsed laser (248 nm). The DLC films were deposited on Si (100) substrates and Cu and Ti were incorporated into the films through adopting a new target design. Visible Raman spectroscopy analysis of G-peak was correlated to internal stress changes in the DLC films due to incorporation of foreign atoms. Reduction of internal stresses in the presence of foreign atoms was established. This is consistent with adhesion studies that showed significant improvement in adhesion of DLC films containing dopants. Nanohardness and Young's modulus of DLC films containing Ti and Cu showed some decrease as compared to pure DLC. The experimental results are discussed in terms of the effect of dopants on the short range environment of the continuous random network (CRN) of DLC.