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Micro-calorimetric sensor for vapor phase explosive detection with optimized heat profile

  • A. Greve
  • , J. Olsen
  • , N. Privorotskaya
  • , L. Senesac
  • , T. Thundat
  • , W. P. King
  • , A. Boisen

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

A heater design, used in a micro-calorimetric sensor, has been optimized for temperature uniformity in order to increase the sensitivity and reliability of detection of trace amounts of explosives. In this abstract the design, fabrication and characterization is described. The performance of the novel heater design is characterized by measuring the temperature coefficient of resistivity (TCR) values and by mapping the temperature distribution using Raman spectroscopy. The new heater design is seen to have increased the temperature uniformity by a factor of 2.3.

Original languageEnglish
Pages (from-to)696-698
Number of pages3
JournalMicroelectronic Engineering
Volume87
Issue number5-8
DOIs
StatePublished - May 2010

Keywords

  • Calorimetry
  • Explosive detection
  • Micro-heater

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