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Millimeter-Wave High Q-factor Sixteenth Mode SIW Cavity Resonator Implemented in 0.18-μm CMOS Technology

  • Kyushu University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

14 Scopus citations

Abstract

Millimeter-wave miniaturized Substrate Integrated Waveguide (SIW) cavity resonator is proposed in 0.18-μm CMOS technology. Miniaturization of the SIW cavity resonator is achieved first by taking 1/16thparts of the standard SIW and employing folded ridge structure. Later this folded ridge sixteenth mode SIW cavity is inductively loaded by a complementary split-ring resonator, which provides internal matching within the cavity resonator. This improved matching enhances the return loss, the external Q-factor, and ultimately, the loaded Q-factor of the proposed cavity resonator. At 60 GHz resonance frequency, the fabricated prototype of the proposed cavity resonator presents a measured reflection coefficient of -33.42 dB, with the external Q- factor 112. Moreover, the active area of the fabricated cavity without measuring pads is only 0.019 mm2.

Original languageEnglish
Title of host publication2022 IEEE/MTT-S International Microwave Symposium, IMS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages560-563
Number of pages4
ISBN (Electronic)9781665496131
DOIs
StatePublished - 2022
Event2022 IEEE/MTT-S International Microwave Symposium, IMS 2022 - Denver, United States
Duration: Jun 19 2022Jun 24 2022

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2022-June

Conference

Conference2022 IEEE/MTT-S International Microwave Symposium, IMS 2022
Country/TerritoryUnited States
CityDenver
Period06/19/2206/24/22

Keywords

  • CMOS technology
  • Q-factor
  • cavity resonators
  • millimeter-wave
  • substrate integrated waveguide (SIW)

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