Modeling multilayered MEMS-based micro-fluidic systems

Shekhar Bhansali; Helen Benjamin; Vandana Upadhyay; Nihat Okulan; Kwang Wook Oh; H. Thurman Henderson; Chong H. Ahn

doi:10.1007/s11837-004-0036-3

Modeling multilayered MEMS-based micro-fluidic systems

Shekhar Bhansali
, Helen Benjamin
, Vandana Upadhyay
, Nihat Okulan
, Kwang Wook Oh
, H. Thurman Henderson
, Chong H. Ahn

Department of Electrical Engineering

University at Buffalo

University of South Florida
University of Cincinnati
Dept. of Electrical and Comp. Eng.

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro-fluidic systems. The first system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/biological detection. The second is a micro-fluidic bio-impedance sensor. The relevance of fluidic dynamics in micro-fluidic channels is discussed in context of fluid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the flow profile and on performance within the micro-systems.

Original language	English
Pages (from-to)	57-61
Number of pages	5
Journal	JOM
Volume	56
Issue number	3
DOIs	https://doi.org/10.1007/s11837-004-0036-3
State	Published - Mar 2004

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title = "Modeling multilayered MEMS-based micro-fluidic systems",

abstract = "This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro-fluidic systems. The first system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/biological detection. The second is a micro-fluidic bio-impedance sensor. The relevance of fluidic dynamics in micro-fluidic channels is discussed in context of fluid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the flow profile and on performance within the micro-systems.",

author = "Shekhar Bhansali and Helen Benjamin and Vandana Upadhyay and Nihat Okulan and Oh, \{Kwang Wook\} and Henderson, \{H. Thurman\} and Ahn, \{Chong H.\}",

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doi = "10.1007/s11837-004-0036-3",

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AU - Bhansali, Shekhar

AU - Benjamin, Helen

AU - Upadhyay, Vandana

AU - Okulan, Nihat

AU - Oh, Kwang Wook

AU - Henderson, H. Thurman

AU - Ahn, Chong H.

PY - 2004/3

Y1 - 2004/3

N2 - This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro-fluidic systems. The first system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/biological detection. The second is a micro-fluidic bio-impedance sensor. The relevance of fluidic dynamics in micro-fluidic channels is discussed in context of fluid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the flow profile and on performance within the micro-systems.

AB - This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro-fluidic systems. The first system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/biological detection. The second is a micro-fluidic bio-impedance sensor. The relevance of fluidic dynamics in micro-fluidic channels is discussed in context of fluid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the flow profile and on performance within the micro-systems.

UR - https://www.scopus.com/pages/publications/1942453844

U2 - 10.1007/s11837-004-0036-3

DO - 10.1007/s11837-004-0036-3

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SN - 1047-4838

VL - 56

SP - 57

EP - 61

JO - JOM

JF - JOM

IS - 3

ER -

Modeling multilayered MEMS-based micro-fluidic systems

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