TY - GEN
T1 - Modelling of viscous squeeze-film damping and the edge correction for perforated microstructures having a special pattern of holes
AU - Homentcovschi, Dorel
AU - Weili, Cui
AU - Miles, Ronald N.
PY - 2008
Y1 - 2008
N2 - This paper contains an analysis of the squeeze-film damping in micro-electromechanical devices having a planar microstructure containing a repetitive pattern of oval holes. The planar microstructures containing oval holes assure a better protection against dust particles and water drops than the microstructures having circular holes. Consequently, they should be preferred in designing protective surfaces for microphones working in natural environment. Analytical formulas are provided for designing a planar microstructure with a periodic system of staggered holes to create a structure having minimum squeeze-film damping with an assigned open area. For the planar microstructures containing aligned oval holes an edge correction is given which accounts for the finite size of real structures.
AB - This paper contains an analysis of the squeeze-film damping in micro-electromechanical devices having a planar microstructure containing a repetitive pattern of oval holes. The planar microstructures containing oval holes assure a better protection against dust particles and water drops than the microstructures having circular holes. Consequently, they should be preferred in designing protective surfaces for microphones working in natural environment. Analytical formulas are provided for designing a planar microstructure with a periodic system of staggered holes to create a structure having minimum squeeze-film damping with an assigned open area. For the planar microstructures containing aligned oval holes an edge correction is given which accounts for the finite size of real structures.
UR - https://www.scopus.com/pages/publications/44849127283
U2 - 10.1115/DETC2007-35712
DO - 10.1115/DETC2007-35712
M3 - Conference contribution
SN - 0791848027
SN - 9780791848029
T3 - 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
SP - 1025
EP - 1033
BT - 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
T2 - 21st Biennial Conference on Mechanical Vibration and Noise, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007
Y2 - 4 September 2007 through 7 September 2007
ER -