Abstract
The demand for monolithically integrated photoreceivers based on Si-based technology keeps increasing as low cost and high reliability products are required for the expanding commercial market. Higher speed and wider operating frequency range are expected when SiGe/Si hetero-junction is introduced to the circuit design. In this paper, a monolithic SiGe/Si PIN-HBT front-end transimpedance photoreceiver is demonstrated for the first time. For this purpose, mesa-type SiGe/Si PIN-HBT technology was developed. Fabricated HBTs exhibit fmax of 34 GHz with DC gain of 25. SiGe/Si PIN photodiodes, which share base and collector layers of HBTs, demonstrate responsivity of 0.3 A/W at λ = 850 nm and bandwidth of 450 MHz. Based on these devices, single- and dual-feedback transimpedance amplifiers were fabricated and they exhibited the bandwidth of 3.2 GHz and 3.3 GHz with the transimpedance gain of 45.2 dBΩ and 47.4 dBΩ, respectively. Monolithically integrated single-feedback PIN-HBT photo-receivers were implemented and the bandwidth was measured to be approximately 0.5 GHz, which is limited by the bandwidth of PIN photodiodes.
| Original language | English |
|---|---|
| Pages | 322-331 |
| Number of pages | 10 |
| DOIs | |
| State | Published - 1997 |
| Event | Proceedings of the 1997 IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits - Ithaca, NY, USA Duration: Aug 4 1997 → Aug 6 1997 |
Conference
| Conference | Proceedings of the 1997 IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits |
|---|---|
| City | Ithaca, NY, USA |
| Period | 08/4/97 → 08/6/97 |
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