@inproceedings{b363d262f9864985ae0647c48f825286,
title = "Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements",
abstract = "This paper presents a multi-threshold inertial switch demonstrated through experimental results. A laterally-driven multi-threshold inertial switch based on SOIMUMPs has been fabricated. The device has been tested by a drop-table test system under different shock accelerations with various amplitudes and pulse widths. The designed switch is a 2-axis device capable of triggering in all directions in a single plane. This work demonstrates that such a designed inertial switch with 3 threshold levels can perform quantitative acceleration measurements while saving power when not activated. The multi-threshold inertial switch can sense a shock range of 800g-2600g. The same device principle can be extended for higher number of bits.",
keywords = "MEMS, multi-threshold, quantitative acceleration measurements",
author = "Qiu Xu and Lvjun Wang and Alhammam Niyazi and Younis, \{Mohammad I.\}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",
year = "2021",
month = jun,
day = "20",
doi = "10.1109/Transducers50396.2021.9495396",
language = "English",
series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "120--123",
booktitle = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
}