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Multi-Threshold MEMS Shock Sensor for Quantitative Acceleration Measerements

  • King Abdullah University of Science and Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

This paper presents a multi-threshold inertial switch demonstrated through experimental results. A laterally-driven multi-threshold inertial switch based on SOIMUMPs has been fabricated. The device has been tested by a drop-table test system under different shock accelerations with various amplitudes and pulse widths. The designed switch is a 2-axis device capable of triggering in all directions in a single plane. This work demonstrates that such a designed inertial switch with 3 threshold levels can perform quantitative acceleration measurements while saving power when not activated. The multi-threshold inertial switch can sense a shock range of 800g-2600g. The same device principle can be extended for higher number of bits.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages120-123
Number of pages4
ISBN (Electronic)9781665412674
DOIs
StatePublished - Jun 20 2021
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: Jun 20 2021Jun 25 2021

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period06/20/2106/25/21

Keywords

  • MEMS
  • multi-threshold
  • quantitative acceleration measurements

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