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New demonstration technique of 20 nm spatial resolution soft X-ray microscopy

  • W. Chao
  • , E. Anderson
  • , G. Denbeaux
  • , B. Harteneck
  • , J. A. Liddle
  • , D. Olynick
  • , A. L. Pearson
  • , F. Salmassi
  • , C. Song
  • , D. Attwood

Research output: Contribution to journalConference articlepeer-review

Abstract

The full-field transmission soft X-ray microscope XM-1, located at LNBL's Advanced Light Source (ALS), is a versatile imaging tool. It provides a unique combination of capabilities. The microscope has been successfully applied to studies of wet biological samples, environmental sciences, nanomagnetic studies, and electromigration studies.

Original languageEnglish
Pages (from-to)225-226
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1
StatePublished - 2003
Event2003 IEEE LEOS Annual Meeting Conference Proceedings - TUCSON, AZ, United States
Duration: Oct 26 2003Oct 30 2003

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