Novel MEMS devices based on conductive polymers

Conductive polymers have received considerable attention as a new material candidate for electronic devices because they conduct electricity. Light transmissive display elements were also constructed based on the electrochromic function, which involves color changes from reversible electrochemical reactions. By contrast, human-machine interface devices are in high demand because of the widespread use of personal mobile computers, tablet computers, and smart phones. These portable devices require highly sophisticated sensors to detect human motions. Thus, to construct flexible large scale sensors for human machine interfaces. Development of the Bio Electromechanical Autonomous Nano Systems (BEANS) project was conducted under the supervision of the New Energy and Industrial Technology Development Organization (NEDO), where new types of hetero-functional integrated devices through innovative fabrication process are addressed.