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Performance and variability comparisons between multi-gate FETs and planar SOI transistors

  • A. V.Y. Thean
  • , Z. H. Shi
  • , L. Mathew
  • , T. Stephens
  • , H. Desjardin
  • , C. Parker
  • , T. White
  • , M. Stoker
  • , L. Prabhu
  • , R. Garcia
  • , B. Y. Nguyen
  • , S. Murphy
  • , R. Rai
  • , J. Conner
  • , B. E. White
  • , S. Venkatesan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

27 Scopus citations

Abstract

This paper compares the performance and inter-die variability of doped and undoped channel Multiple-Gate FETs (MUGFETs) with respect to planar SOI devices. We show that doped-channel FinFETs have equivalent variability to narrow-width planar devices. As such, transitions to FinFETs for narrow-width devices will likely incur minimal variability impact. To match the low variability of wide-width planar devices, conversions to undoped channel FinFETs will be necessary. Furthermore, good short-channel control has to be maintained since undoped channel devices exhibit increase sensitivity to Tbody relative to doped channel FinFETs due to enhanced fully-depleted channel electrostatics.

Original languageEnglish
Title of host publication2006 International Electron Devices Meeting Technical Digest, IEDM
DOIs
StatePublished - 2006
Event2006 International Electron Devices Meeting, IEDM - San Francisco, CA, United States
Duration: Dec 10 2006Dec 13 2006

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM

Conference

Conference2006 International Electron Devices Meeting, IEDM
Country/TerritoryUnited States
CitySan Francisco, CA
Period12/10/0612/13/06

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