Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications

Hu Tao; Andrew C. Strikwerda; Mengkun Liu; Jessica P. Mondia; Evren Ekmekci; Kebin Fan; David L. Kaplan; Willie J. Padilla; Xin Zhang; Richard D. Averitt; Fiorenzo G. Omenetto

doi:10.1063/1.3533367

Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications

Hu Tao
, Andrew C. Strikwerda
, Mengkun Liu
, Jessica P. Mondia
, Evren Ekmekci
, Kebin Fan
, David L. Kaplan
, Willie J. Padilla
, Xin Zhang
, Richard D. Averitt
, Fiorenzo G. Omenetto

Physics and Astronomy

Stony Brook University

Tufts University
Boston University

Research output: Contribution to journal › Article › peer-review

202 Scopus citations

Abstract

We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications.

Original language	English
Article number	261909
Journal	Applied Physics Letters
Volume	97
Issue number	26
DOIs	https://doi.org/10.1063/1.3533367
State	Published - Dec 27 2010

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title = "Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications",

abstract = "We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications.",

author = "Hu Tao and Strikwerda, \{Andrew C.\} and Mengkun Liu and Mondia, \{Jessica P.\} and Evren Ekmekci and Kebin Fan and Kaplan, \{David L.\} and Padilla, \{Willie J.\} and Xin Zhang and Averitt, \{Richard D.\} and Omenetto, \{Fiorenzo G.\}",

year = "2010",

month = dec,

day = "27",

doi = "10.1063/1.3533367",

language = "English",

volume = "97",

journal = "Applied Physics Letters",

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TY - JOUR

T1 - Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications

AU - Tao, Hu

AU - Strikwerda, Andrew C.

AU - Liu, Mengkun

AU - Mondia, Jessica P.

AU - Ekmekci, Evren

AU - Fan, Kebin

AU - Kaplan, David L.

AU - Padilla, Willie J.

AU - Zhang, Xin

AU - Averitt, Richard D.

AU - Omenetto, Fiorenzo G.

PY - 2010/12/27

Y1 - 2010/12/27

N2 - We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications.

AB - We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications.

UR - https://www.scopus.com/pages/publications/78650905246

U2 - 10.1063/1.3533367

DO - 10.1063/1.3533367

M3 - Article

SN - 0003-6951

VL - 97

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 26

M1 - 261909

ER -

Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications

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