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Physical vapor transport crystal growth of ZnO

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations

Abstract

Physical vapor transport (PVT) growth of mm-size, polycrystalline ZnO has been demonstrated at temperatures exceeding 1600°C under air at atmospheric pressure. Scanning electron microscopy (SEM) analysis revealed the growth of grains and microcrystals with strong faceted morphologies suggesting near-equilibrium growth conditions. In addition, a temperature-dependent formula for the O2 sticking coefficient has been developed to predict the maximum growth rate of PVT ZnO. Combining this formula with an existing one-dimensional analytical model for PVT growth of bulk AlN, the value of the growth rate of PVT ZnO as a function of temperature and oxygen vapor partial pressure has been studied. This analysis predicts that growth rates in the order of 1mm/h could be theoretically achieved using the PVT method under non-stoichiometric oxygen-rich vapor pressures and temperatures exceeding 1600°C.

Original languageEnglish
Title of host publicationZinc Oxide Materials and Devices
DOIs
StatePublished - 2006
EventZinc Oxide Materials and Devices - San Jose, CA, United States
Duration: Jan 22 2006Jan 25 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6122

Conference

ConferenceZinc Oxide Materials and Devices
Country/TerritoryUnited States
CitySan Jose, CA
Period01/22/0601/25/06

Keywords

  • Bulk growth
  • Growth habit
  • Growth rate
  • High temperature
  • Physical vapor transport
  • Sticking coefficient
  • Sublimation
  • Zinc oxide

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