@inproceedings{071bcdc09c64401e9f81118f81f4a801,
title = "Physically micromachined silica-on-silicon integrated corner mirrors",
abstract = "Turning or corner mirrors can be used to redirected light on an integrated chip, providing a route to higher density of optical components. Mirrors have been demonstrated in silicon-on-insulator with losses of 0.9dB [1] and in hollow waveguides with losses of 0.8dB [2]. We demonstrate an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.",
author = "Carpenter, \{Lewis G.\} and Rogers, \{Helen L.\} and Christopher Holmes and Gates, \{James C.\} and Smith, \{Peter G.R.\}",
year = "2011",
doi = "10.1109/CLEOE.2011.5942821",
language = "English",
isbn = "9781457705335",
series = "2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011",
booktitle = "2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011",
note = "2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011 ; Conference date: 22-05-2011 Through 26-05-2011",
}