Piezoresistive detection of acoustic waves

A. Passian; P. G. Evans; V. K. Varma; T. L. Ferrell; T. Thundat

doi:10.1063/1.1532836

Piezoresistive detection of acoustic waves

A. Passian
, P. G. Evans
, V. K. Varma
, T. L. Ferrell
, T. Thundat

Department of Chemical and Biological Engineering

University at Buffalo

Oak Ridge National Laboratory

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.

Original language	English
Pages (from-to)	1031-1035
Number of pages	5
Journal	Review of Scientific Instruments
Volume	74
Issue number	2
DOIs	https://doi.org/10.1063/1.1532836
State	Published - Feb 2003

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10.1063/1.1532836

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title = "Piezoresistive detection of acoustic waves",

abstract = "Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.",

author = "A. Passian and Evans, \{P. G.\} and Varma, \{V. K.\} and Ferrell, \{T. L.\} and T. Thundat",

year = "2003",

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doi = "10.1063/1.1532836",

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T1 - Piezoresistive detection of acoustic waves

AU - Passian, A.

AU - Evans, P. G.

AU - Varma, V. K.

AU - Ferrell, T. L.

AU - Thundat, T.

PY - 2003/2

Y1 - 2003/2

N2 - Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.

AB - Piezoresistive detection of acoustic waves was discussed. It is based on the harmonic oscillations of a piezoresistive microcantilever. Results showed that a microcantilever can be used as an acoustic sensor for frequencies within its resonance frequency width.

UR - https://www.scopus.com/pages/publications/0037327286

U2 - 10.1063/1.1532836

DO - 10.1063/1.1532836

M3 - Article

SN - 0034-6748

VL - 74

SP - 1031

EP - 1035

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 2

ER -

Piezoresistive detection of acoustic waves

Abstract

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