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Plasma-assisted molecular beam epitaxy of GaN on porous SiC substrates with varying porosity

  • Ashutosh Sagar
  • , C. D. Lee
  • , R. M. Feenstra
  • , C. K. Inoki
  • , T. S. Kuan

Research output: Contribution to journalArticlepeer-review

30 Scopus citations
Original languageEnglish
Pages (from-to)1812-1817
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number4
DOIs
StatePublished - 2003

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