Abstract
We present a low power high sensitive in-plane resonant bidirectional Lorentz-force magnetic micro-sensor operating in air at ambient pressure. The concept is based on the detection of the resonance frequency shift of an electrothermally straight micro-beam resonator operated near the buckling point. Powered at 20 mu text{W} , the micro-sensor shows a measured sensitivity (S) of 3.32/(mA.T), which is very high compared to the state of the art. The proposed method is simple in design making it promising for achieving practical low-cost magnetometer.
| Original language | English |
|---|---|
| Article number | 9343302 |
| Pages (from-to) | 406-409 |
| Number of pages | 4 |
| Journal | IEEE Electron Device Letters |
| Volume | 42 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2021 |
Keywords
- Bidirectional magnetic sensors
- buckling point
- high sensitivity
- low power
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