Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing

James C. Switzer; Mark D. Poliks; Paul Wickboldt; Elizabeth Tiberio; Mingming Guo

Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing

James C. Switzer
, Mark D. Poliks
, Paul Wickboldt
, Elizabeth Tiberio
, Mingming Guo

School of Sys Sci Ind Engr

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010
Pages	989-1024
Number of pages	36
State	Published - 2010
Event	Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010 - Myrtle Beach, SC, United States Duration: Oct 17 2010 → Oct 20 2010

Publication series

Name	Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010
Volume	2

Conference

Conference	Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010
Country/Territory	United States
City	Myrtle Beach, SC
Period	10/17/10 → 10/20/10

Cite this

Switzer, J. C., Poliks, M. D., Wickboldt, P., Tiberio, E., & Guo, M. (2010). Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing. In Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010 (pp. 989-1024). (Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010; Vol. 2).

Switzer, James C. ; Poliks, Mark D. ; Wickboldt, Paul et al. / Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing. Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010. 2010. pp. 989-1024 (Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010).

@inproceedings{42a27cbdc8284b78be624460322e89bf,

title = "Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing",

author = "Switzer, \{James C.\} and Poliks, \{Mark D.\} and Paul Wickboldt and Elizabeth Tiberio and Mingming Guo",

year = "2010",

language = "English",

isbn = "9781617820236",

series = "Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010",

pages = "989--1024",

booktitle = "Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010",

note = "Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010 ; Conference date: 17-10-2010 Through 20-10-2010",

}

Switzer, JC, Poliks, MD, Wickboldt, P, Tiberio, E & Guo, M 2010, Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing. in Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010. Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010, vol. 2, pp. 989-1024, Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010, Myrtle Beach, SC, United States, 10/17/10.

Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing. / Switzer, James C.; Poliks, Mark D.; Wickboldt, Paul et al.
Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010. 2010. p. 989-1024 (Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing

AU - Switzer, James C.

AU - Poliks, Mark D.

AU - Wickboldt, Paul

AU - Tiberio, Elizabeth

AU - Guo, Mingming

PY - 2010

Y1 - 2010

UR - https://www.scopus.com/pages/publications/84865500969

M3 - Conference contribution

SN - 9781617820236

T3 - Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010

SP - 989

EP - 1024

BT - Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010

T2 - Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010

Y2 - 17 October 2010 through 20 October 2010

ER -

Switzer JC, Poliks MD, Wickboldt P, Tiberio E, Guo M. Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing. In Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010. 2010. p. 989-1024. (Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 24th International Vacuum Web Coating Conference 2010).

Room temperature roll-to-roll deposition of ITO at the center for advanced microelectronics manufacturing

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