Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures

Weilun Chao; Erik Anderson; Gregory P. Denbeaux; Bruce Harteneck; J. Alexander Liddle; Deirdre L. Olynick; Angelic L. Pearson; Farhad Salmassi; Cheng Yu Song; David T. Attwood

doi:10.1364/OL.28.002019

Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures

Weilun Chao
, Erik Anderson
, Gregory P. Denbeaux
, Bruce Harteneck
, J. Alexander Liddle
, Deirdre L. Olynick
, Angelic L. Pearson
, Farhad Salmassi
, Cheng Yu Song
, David T. Attwood

Nanoscale Science and Engineering

University at Albany

Lawrence Berkeley National Laboratory
University of California at Berkeley

Research output: Contribution to journal › Article › peer-review

63 Scopus citations

Abstract

A spatial resolution of 20 nm was demonstrated by using soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. This microscope uses bend magnet radiation from the advanced light source for imaging. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.

Original language	English
Pages (from-to)	2019-2021
Number of pages	3
Journal	Optics Letters
Volume	28
Issue number	21
DOIs	https://doi.org/10.1364/OL.28.002019
State	Published - Nov 1 2003

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10.1364/OL.28.002019

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@article{0a69bec8172d469b848a1a461eadaa9b,

title = "Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures",

abstract = "A spatial resolution of 20 nm was demonstrated by using soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. This microscope uses bend magnet radiation from the advanced light source for imaging. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.",

author = "Weilun Chao and Erik Anderson and Denbeaux, \{Gregory P.\} and Bruce Harteneck and \{Alexander Liddle\}, J. and Olynick, \{Deirdre L.\} and Pearson, \{Angelic L.\} and Farhad Salmassi and Song, \{Cheng Yu\} and Attwood, \{David T.\}",

year = "2003",

month = nov,

day = "1",

doi = "10.1364/OL.28.002019",

language = "English",

volume = "28",

pages = "2019--2021",

journal = "Optics Letters",

issn = "0146-9592",

number = "21",

}

TY - JOUR

T1 - Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures

AU - Chao, Weilun

AU - Anderson, Erik

AU - Denbeaux, Gregory P.

AU - Harteneck, Bruce

AU - Alexander Liddle, J.

AU - Olynick, Deirdre L.

AU - Pearson, Angelic L.

AU - Salmassi, Farhad

AU - Song, Cheng Yu

AU - Attwood, David T.

PY - 2003/11/1

Y1 - 2003/11/1

N2 - A spatial resolution of 20 nm was demonstrated by using soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. This microscope uses bend magnet radiation from the advanced light source for imaging. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.

AB - A spatial resolution of 20 nm was demonstrated by using soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. This microscope uses bend magnet radiation from the advanced light source for imaging. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.

UR - https://www.scopus.com/pages/publications/0242301684

U2 - 10.1364/OL.28.002019

DO - 10.1364/OL.28.002019

M3 - Article

SN - 0146-9592

VL - 28

SP - 2019

EP - 2021

JO - Optics Letters

JF - Optics Letters

IS - 21

ER -

Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures

Abstract

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